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Low deposition temperature
WHERE t1.sid in(parameter_dbtbl_keyword '%Low deposition temperature%') and t1.xml_status <> 99
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"Low deposition temperature"
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Facing target sputtering (1)
High deposition rate (1)
Low deposition temperature (1)
Permanent magnet array (1)
Silicon oxide (1)
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2009 (1)
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Kang Bae (1)
Jae Suk Hong (1)
Hwa Min Kim (1)
Sun Young Sohn (1)
Tae Hyun Wang (1)
Keywords
Facing target sputtering (1)
High deposition rate (1)
Low deposition temperature (1)
Permanent magnet array (1)
Silicon oxide (1)
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Kang Bae (1)
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Tae Hyun Wang (1)
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"Low deposition temperature"
Characteristics of SiOx Gas Barrier Films as a Function of Process Conditions in Facing Target Sputtering (FTS) System
Kang Bae, Tae Hyun Wang, Sun Young Sohn, Hwa Min Kim, Jae Suk Hong
J Electr Electron Mater
2009;22(7):595-601.
Published online July 1, 2009
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