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Incubation time
WHERE t1.sid in(parameter_dbtbl_keyword '%Incubation time%') and t1.xml_status <> 99
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incubation time (2)
RPCVD (2)
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extrinsic base (1)
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2003 (2)
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Jin Young Kang (1)
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Sang Hoon Kim (1)
Sang Hun Kim (1)
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"Incubation time"
Low-Temperature Selective Epitaxial Growth of SiGe using a Cyclic Process of Deposition-and-Etching
Sang Hun Kim, Seung Yun Lee, Chan U Park, Gyu Hwan Sim, Jin Yeong Kang
J Electr Electron Mater
2003;16(8):657-662.
Published online August 1, 2003
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Selective Epitaxial Growth of Si and SiGe using Si-Ge-H-Cl System for Self-Aligned HBT Applications
Sang Hoon Kim, Chan Woo Park, Seung Yun Lee, Kyu Hwan Shim, Jin Young Kang
J Electr Electron Mater
2003;16(7):573-578.
Published online July 1, 2003
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