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"In-situ doped"

Study on P-type in-situ doped Polysilicon Films
Jung Sup Oh, Sang Eun Lee, Jin Tae Noh, Sang Woo Lee, Kyoung Sung Bae, Yong Han Roh
J Korean Inst Electr Electron Mater Eng 2008;21(3):208-212.   Published online March 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.3.208
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