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High-density plasma
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"High-density plasma"
Box Cathode Sputtering Technologies for Organic-based Optoelectronics
Han Ki Kim
J Korean Inst Electr Electron Mater Eng
2006;19(4):373-378.
Published online April 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.4.373
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