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"Hardness and elastic modulus"

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"Hardness and elastic modulus"

CrC Interlayer Effect on Tribological Properties of Amorphous Carbon Deposited by UBMS Method
Phil Jung Kim, Yong Seob Park
J Korean Inst Electr Electron Mater Eng 2018;31(7):475-480.   Published online November 1, 2018
DOI: https://doi.org/10.4313/JKEM.2018.31.7.475
We investigated the tribological properties of amorphous carbon (a-C) films deposited with CrC interlayers of various thicknesses as the adhesive layer. A-C and CrC thin films were deposited using the unbalanced magnetron (UBM) sputtering method with graphite and chromium as the targets. CrC films as the interlayer were fabricated under a-C films, and various structural, surface, and tribological properties of a-C films deposited with various CrC interlayer thicknesses were investigated. With various CrC interlayer thicknesses under a-C films, the tribological properties of CrC/a-C films were improved; the increased film thickness exhibited a maximum high hardness of over 27.5 GPa, high elastic modulus of over 242 GPa, critical load of 31 N, residual stress of 1.85 GPa, and a smooth surface below 0.09 nm at the condition of 30-nm CrC thickness.
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