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"HF-PECVD"

Etching Treatment of Vertically Aligned Carbon Nanotubes for the Application to Biosensor
Eun Chang Choi, Yong Seob Park, Won Seok Choi, Byung You Hong
J Korean Inst Electr Electron Mater Eng 2008;21(7):594-597.   Published online July 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.7.594
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