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Gas barrier film
WHERE t1.sid in(parameter_dbtbl_keyword '%Gas barrier film%') and t1.xml_status <> 99
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"Gas barrier film"
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Facing target sputtering (1)
Gas barrier film (1)
Low temperature process (1)
Uniformity (1)
ZrO2 (1)
Publication year
2009 (1)
Authors
Do Hyun Cho (1)
Ji Hwan Kim (1)
Hwa Min Kim (1)
Jong Jae Kim (1)
Sun Young Sohn (1)
Keywords
Facing target sputtering (1)
Gas barrier film (1)
Low temperature process (1)
Uniformity (1)
ZrO2 (1)
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Do Hyun Cho (1)
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Hwa Min Kim (1)
Jong Jae Kim (1)
Sun Young Sohn (1)
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"Gas barrier film"
Properties of ZrO2 Gas Barrier Film using Facing Target Sputtering System with Low Temperature Deposition Process for Flexible Displays
Ji Hwan Kim, Do Hyun Cho, Sun Young Sohn, Hwa Min Kim, Jong Jae Kim
J Electr Electron Mater
2009;22(5):425-430.
Published online May 1, 2009
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