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Gas barrier Layer
WHERE t1.sid in(parameter_dbtbl_keyword '%Gas barrier Layer%') and t1.xml_status <> 99
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"Gas barrier Layer"
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Facing target sputtering (1)
Gas barrier Layer (1)
High deposition rate (1)
SiOx (1)
SiOxNy (1)
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2009 (1)
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Hwa Min Kim (1)
Yong Jin Park (1)
Sun Young Sohn (1)
Jin Woon Son (1)
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Facing target sputtering (1)
Gas barrier Layer (1)
High deposition rate (1)
SiOx (1)
SiOxNy (1)
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"Gas barrier Layer"
Process Characteristics of SiOx and SiOxNy Films on a Gas Barrier Layer using Facing Target Sputtering (FTS) System
Jin Woon Son, Yong Jin Park, Sun Young Sohn, Hwa Min Kim
J Korean Inst Electr Electron Mater Eng
2009;22(12):1028-1032.
Published online December 1, 2009
DOI:
https://doi.org/10.4313/JKEM.2009.22.12.1028
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