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Forming Gas Annealing
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Chang Ki Seo (1)
Myung Suk Shim (1)
Jun Sin Yi (1)
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"Forming Gas Annealing"
Studies for Improvement in SiO2, Film Property for Thin Film Transistor
Chang Ki Seo, Myung Suk Shim, Jun Sin Yi
J Electr Electron Mater
2004;17(6):580-585.
Published online June 1, 2004
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