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"Focused electron beam induced processing"

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"Focused electron beam induced processing"

Focused Electron Beam-Controlled Graphene Field-Effect Transistor
Songkil Kim
J Electr Electron Mater 2020;33(5):360-366.   Published online September 1, 2020
DOI: https://doi.org/10.4313/JKEM.2021.33.5.5
Focused electron beams with high energy acceleration are versatile probes. Focused electron beams can be used for high-resolution imaging and multi-mode nanofabrication, in combination with, molecular precursor delivery, in an electron microscopy environment. A high degree of control with atomic-to-microscale resolution, a focused electron beam allows for precise engineering of a graphene-based field-effect transistor (FET). In this study, the effect of electron irradiation on a graphene FET was systematically investigated. A separate evaluation of the electron beam induced transport properties at the graphene channel and the graphene-metal contacts was conducted. This provided on-demand strategies for tuning transfer characteristics of graphene FETs by focused electron beam irradiation.
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