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Fluorocarbon
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"Fluorocarbon"
A Study on The Improvement of Profile Tilting or Bottom Distortion in HARC
J Korean Inst Electr Electron Mater Eng
2005;18(5):389-395.
Published online May 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.5.389
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