Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
Embossing
WHERE t1.sid in(parameter_dbtbl_keyword '%Embossing%') and t1.xml_status <> 99
2
results for
"Embossing"
Filter
Keywords
Anisotropic wet etching (1)
Defect control (1)
Elastic stress relaxation (1)
Embossing (1)
Free space compensation (1)
More +
Publication year
2006 (1)
2005 (1)
Authors
Yu Min Jung (1)
Yeong Cheol Kim (1)
Keywords
Anisotropic wet etching (1)
Defect control (1)
Elastic stress relaxation (1)
Embossing (1)
Free space compensation (1)
Hot embossing Lithography (1)
Multi-mode planar waveguide (1)
Nanoimprint Lithography (1)
Scaled down stamp (1)
Silicon hard master (1)
Cancel
Close
authors
Yu Min Jung (1)
Yeong Cheol Kim (1)
Cancel
Close
Publication Year
2006 (1)
2005 (1)
Cancel
Close
Funded articles
Cancel
Close
"Embossing"
Improved Defect Control Problem using Scaled Down Silicon Oxide Stamps for Nanoimprint Lithography
J Electr Electron Mater
2006;19(2):130-138.
Published online February 1, 2006
PDF
12
View
0
Download
Multi-mode Planar Waveguide Fabricated by a (110) Silicon Hard Master
Yu Min Jung, Yeong Cheol Kim
J Electr Electron Mater
2005;18(12):1106-1110.
Published online December 1, 2005
PDF
8
View
0
Download
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
