Properties of ZrO2 Gas Barrier Film using Facing Target Sputtering System with Low Temperature Deposition Process for Flexible Displays Ji Hwan Kim, Do Hyun Cho, Sun Young Sohn, Hwa Min Kim, Jong Jae Kim Journal of Korean Institute of Electrical and Electronic Materials Engineers.2009; 22(5): 425. CrossRef
Process Characteristics of SiOx and SiOxNy Films on a Gas Barrier Layer using Facing Target Sputtering (FTS) System Jin Woon Son, Yong Jin Park, Sun Young Sohn, Hwa Min Kim Journal of Korean Institute of Electrical and Electronic Materials Engineers.2009; 22(12): 1028. CrossRef