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"Defect creation"

The GIDL Current Characteristics of P-Type Poly-Si TFT Aged by Off-State Stress
Donggi Shin, Kyungsoo Jang, Nguyen Thi Cam Phu, Heejun Park, Jeongsoo Kim, Joonghyun Park, Junsin Yia
J Electr Electron Mater 2018;31(6):372-376.   Published online September 1, 2018
The effects of off-state bias stress on the characteristics of p-type poly-Si TFT were investigated. To reduce the gate-induced drain leakage (GIDL) current, the off-state bias stress was changed by varying Vgs and Vds. After application of the off-state bias stress, the Vgs causing GIDL current was dramatically increased from 1 to 10 V, and thus, the Vgs margin to turn off the TFT was improved. The on-current and subthreshold swing in the aged TFT was maintained. We performed a technology computer-aided design (TCAD) simulation to describe the aged characteristics. The aged-transfer characteristics were well described by the local charge trapping. The activation energy of the GIDL current was measured for the pristine and aged characteristics. The reduced GIDL current was mainly a thermionic field-emission current.
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