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Deep silicon etching
WHERE t1.sid in(parameter_dbtbl_keyword '%Deep silicon etching%') and t1.xml_status <> 99
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Se Geun Park (1)
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"Deep silicon etching"
The Development of Deep Silicon Etch Process with Conventional Inductively Coupled Plasma (ICP) Etcher
Soo Beom Jo, Se Geun Park, Beom Hoan O
J Electr Electron Mater
2004;17(7):701-707.
Published online July 1, 2004
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