Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
Article Template
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
DHF
WHERE t1.sid in(parameter_dbtbl_keyword '%DHF%') and t1.xml_status <> 99
1
results for
"DHF"
Filter
Keywords
Barrier metal (1)
DHF (1)
Metal contamination (1)
Oxide loss (1)
Residue (1)
Publication year
2003 (1)
Authors
Eui Goo Chang (1)
Sang Yong Kim (1)
Nam Hoon Kim (1)
In Pyo Kim (1)
Keywords
Barrier metal (1)
DHF (1)
Metal contamination (1)
Oxide loss (1)
Residue (1)
Cancel
Close
authors
Eui Goo Chang (1)
Sang Yong Kim (1)
Nam Hoon Kim (1)
In Pyo Kim (1)
Cancel
Close
Publication Year
2003 (1)
Cancel
Close
Funded articles
Cancel
Close
"DHF"
Investigation on DHF Application at Metal CMP Cleaning Process
Sang Yong Kim, Nam Hoon Kim, In Pyo Kim, Eui Goo Chang
J Korean Inst Electr Electron Mater Eng
2003;16(7):569-572.
Published online July 1, 2003
DOI:
https://doi.org/10.4313/JKEM.2003.16.7.569
PDF
62
View
0
Download
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
