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DC reactive sputtering
WHERE t1.sid in(parameter_dbtbl_keyword '%DC reactive sputtering%') and t1.xml_status <> 99
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"DC reactive sputtering"
Study on Depositing Oxide Films on Ni Substrate for Superconducting Tape
Ho-Sup Kim, Dongqui Shi, Rock-Kil Ko, Jun-Ki Chung, Hong-Soo На, Kyu-Jeong Song, Chan Park
J Electr Electron Mater
2004;17(12):1356-1361.
Published online December 1, 2004
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