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"Continuous compositional spread"

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"Continuous compositional spread"

Tuning for Temperature Coefficient of Resistance Through Continuous Compositional Spread Sputtering Method
Ji-hun Park, Jeong-woo Sun, Woo-jin Choi, Sang-joon Jin, Jin-hwan Kim, Dong-ho Jeon, Saeng-soo Yun, Jae-il Chun, Jin-ju Lim, Wook Jo
J Electr Electron Mater 2024;37(3):322-327.   Published online May 1, 2024
DOI: https://doi.org/10.4313/JKEM.2024.37.3.13
The low-temperature coefficient of resistance (TCR) is a crucial factor in the development of space-grade resistors for temperature stability. Consequently, extensive research is underway to achieve zero TCR. In this study, resistors were deposited by co-sputtering nickel-chromium-based composite compositions, metals showing positive TCR, with SiO2, introducing negative TCR components. It was observed that achieving zero TCR is feasible by adjusting the proportion of negative TCR components in the deposited thin film resistors within certain compositions. Additionally, the correlation between TCR and deposition conditions, such as sputtering power, Ar pressure, and surface roughness, was investigated. We anticipate that these findings will contribute to the study of resistors with very low TCR, thereby enhancing the reliability of space-level resistors operating under high temperatures.
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