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"Compound semiconductor"

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"Compound semiconductor"

RTA Effect on Transport Characteristics in Al0.25Ga0.75As/In0.2Ga0.8As pHEMT Epitaxial Structures Grown by Molecular Beam Epitaxy
J Korean Inst Electr Electron Mater Eng 2006;19(7):605-610.   Published online July 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.7.605
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High Density Inductively Coupled Plasma Etching of 3-5 Semiconductors in BCI3/Ne Chemistry
In Gyu Baeg, Wan Tae Im, Je Won Lee, Gwan Sig Jo
J Korean Inst Electr Electron Mater Eng 2003;16(12s):1187-1194.
DOI: https://doi.org/10.4313/JKEM.2003.16.12s.1187
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