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Closed-field unbalanced magnetron
WHERE t1.sid in(parameter_dbtbl_keyword '%Closed-field unbalanced magnetron%') and t1.xml_status <> 99
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"Closed-field unbalanced magnetron"
Synthesis and Lubricant Properties of Nitrogen doped Amorphous Carbon (a-C:N) Thin Films by Closed-field unbalanced Magnetron Sputtering Method
J Electr Electron Mater
2007;20(8):701-705.
Published online August 1, 2007
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