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Charge pumping current
WHERE t1.sid in(parameter_dbtbl_keyword '%Charge pumping current%') and t1.xml_status <> 99
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Charge pumping current (1)
Copper (1)
Cu diffusion (1)
Diffusion barrier (1)
Pt/Ti (1)
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2003 (1)
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Sung Keun Chang (1)
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Charge pumping current (1)
Copper (1)
Cu diffusion (1)
Diffusion barrier (1)
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"Charge pumping current"
A Study on the Diffusion Barrier Properties of Pt/Ti and Ni/Ti for Cu Metallization
Sung Keun Chang
J Electr Electron Mater
2003;16(2):97-101.
Published online February 1, 2003
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