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Ceria slurry
WHERE t1.sid in(parameter_dbtbl_keyword '%Ceria slurry%') and t1.xml_status <> 99
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"Ceria slurry"
Polishing Properties by Change of Slurry Temperature in Oxide CMP
J Electr Electron Mater
2005;18(3):219-225.
Published online March 1, 2005
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