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"Ceramic/metal halide composite"

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"Ceramic/metal halide composite"

Development of Humidity Sensor Based on Ceramic/Metal Halide Composite Films for Non-Contact Biological Signal Monitoring Applications
Tae-ung Park, Ik-soo Kim, Min-ji Kim, Chulhwan Park, Eui-kyoung Seo, Jong-min Oh
J Electr Electron Mater 2022;35(4):412-417.   Published online July 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.4.15
Capacitive-type humidity sensors with a high sensitivity and fast response/recovery times have attracted a great attention in non-contact respiration biological signal monitoring applications. However, complicated fabrication processes involving high-temperature heat treatment for the hygroscopic film is essential in the conventional ceramic-based humidity sensors. In this study, a non-toxic ceramic/metal halide (BaTiO3(BT)/NaCl) humidity sensor was prepared at room temperature using a solvent-free aerosol deposition process (AD) without any additional process. Currently prepared BT/NaCl humidity sensor shows an excellent sensitivity (245 pF/RH%) and superior response/recovery times (3s/4s) due to the NaCl ionization effect resulting in an immense interfacial polarization. Furthermore, the non-contact respiration signal variation using the BT/NaCl sensor was determined to be over 700% by maintaining the distance of 20 cm between the individual and the sensor. Through the AD-fabricated sensor in this study, we expect to develop a non-contact biological signal monitoring system that can be applied to various fields such as respiratory disease detection and management, infant respiratory signal observation, and touchless skin moisture sensing button.
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