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Carbon nitride films
WHERE t1.sid in(parameter_dbtbl_keyword '%Carbon nitride films%') and t1.xml_status <> 99
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"Carbon nitride films"
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Carbon nitride films (3)
Sputtering system (2)
Alumina (1)
Humidity sensors (1)
Micro-humidity sensors (1)
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2007 (1)
2004 (1)
2003 (1)
Authors
Ji Gong Lee (2)
Seong Pil Lee (2)
Se Geun Ha (1)
Jeong Hun Kim (1)
Keywords
Carbon nitride films (3)
Sputtering system (2)
Alumina (1)
Humidity sensors (1)
Micro-humidity sensors (1)
MIM structure (1)
RF magnetron sputter (1)
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Ji Gong Lee (2)
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"Carbon nitride films"
A Study on Physical Properties of Carbon Nitride Films and Application for Sensor Materials
J Electr Electron Mater
2007;20(5):436-442.
Published online May 1, 2007
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A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films
Ji Gong Lee, Se Geun Ha, Jeong Hun Kim, Seong Pil Lee
J Electr Electron Mater
2004;17(5):521-525.
Published online May 1, 2004
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Crystalline Properties of Carbon Nitride Films According to Substrates and Growth Conditions
Ji Gong Lee, Seong Pil Lee
J Electr Electron Mater
2003;16(12):1103-1109.
Published online December 1, 2003
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