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CMP (chemical mechanical polishing)
WHERE t1.sid in(parameter_dbtbl_keyword '%CMP (chemical mechanical polishing)%') and t1.xml_status <> 99
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Yong Jin Seo (1)
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"CMP (chemical mechanical polishing)"
Role of Oxidants for Metal CMP Applications
Yong Jin Seo, Sang Yong Kim, U Seon Lee
J Electr Electron Mater
2004;17(4):378-383.
Published online April 1, 2004
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