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CF4/O2
WHERE t1.sid in(parameter_dbtbl_keyword '%CF4/O2%') and t1.xml_status <> 99
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CF4/O2 (1)
Etching (1)
ICP (1)
OES (1)
Ru (1)
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2002 (1)
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Jang Hyun Choi (1)
Dong Pyo Kim (1)
Kyoung Tae Kim (1)
Chang Il Kim (1)
Kyu Tae Lim (1)
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"CF4/O2"
Surface Reaction of Ru Thin Films Etched in CF4/O2 Gas Chemistry
Kyu Tae Lim, Dong Pyo Kim, Kyoung Tae Kim, Chang Il Kim, Jang Hyun Choi, Joon Tae Song
J Korean Inst Electr Electron Mater Eng
2002;15(12):1016-1020.
Published online December 1, 2002
DOI:
https://doi.org/10.4313/JKEM.2002.15.12.1016
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