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"Break-In"

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"Break-In"

Stability and Improvement of Polishing Pad in W CMP
J Korean Inst Electr Electron Mater Eng 2007;20(12):1027-1033.   Published online December 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.12.1027

Citations

Citations to this article as recorded by  
  • A Study on the Polishing Characteristics Using Floating Nozzle in Linear Roll CMP
    Chiho Lee, Haedo Jeong
    Journal of the Korean Society for Precision Engineering.2015; 32(7): 627.     CrossRef
  • Statistical Analysis on Process Variables in Linear Roll-CMP
    Han Wang, Hyunseop Lee, Haedo Jeong
    Journal of the Korean Society of Tribologists and Lubrication Engineers.2014; 30(3): 139.     CrossRef
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Polishing Pad Analysis and Improvement to Control Performance
J Korean Inst Electr Electron Mater Eng 2007;20(10):839-845.   Published online October 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.10.839
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