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"Boron cluster (B18H22)"

Improving the Thermal Stability of Ni-silicide using Ni-V on Boron Cluster Implanted Source/drain for Nano-scale CMOSFETs
J Korean Inst Electr Electron Mater Eng 2007;20(6):487-490.   Published online June 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.6.487
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