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Back pressure
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"Back pressure"
A Study on DOE Method to Optimize the Process Parameters for Cu CMP
J Korean Inst Electr Electron Mater Eng
2005;18(1):24-29.
Published online January 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.1.024
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Citations
Citations to this article as recorded by
Statistical Analysis on Process Variables in Linear Roll-CMP
Han Wang, Hyunseop Lee, Haedo Jeong
Journal of the Korean Society of Tribologists and Lubrication Engineers.2014; 30(3): 139.
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