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"Asymmetric trench MOSFET"

Effect of P-Emitter Length and Structure on Asymmetric SiC MOSFET Performance
Dong-hyeon Kim, Sang-mo Koo
J Electr Electron Mater 2020;33(2):83-87.   Published online March 1, 2020
DOI: https://doi.org/10.4313/JKEM.2021.33.2.1
In this letter, we propose and analyze a new asymmetric structure that can be used for next-generation power semiconductor devices. We compare and analyze the electrical characteristics of the proposed device with respect to those of symmetric devices. The proposed device has a p-emitter on the right side of the cell. The peak electric field is reduced by the shielding effect caused by the p-emitter structure. Consequently, the breakdown voltage is increased. The proposed asymmetric structure has an approximately 100% higher Baliga’s figure of merit (~94.22 MW/cm2) than the symmetric structure (~46.93 MW/cm2), and the breakdown voltage of the device increases by approximately 70%.
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