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"Aluminosilicate"

Synthesis of Electro-conducting Macroporous Aluminosilicate-Carbon Nanocomposite
Kwang Min Choi, Woo-seok Cho, Jong-young Kim, Jong-yeol Jung, Seung-woo Baik, Kyu Hyoung Lee
J Electr Electron Mater 2017;30(2):67-73.   Published online February 1, 2017
Recently, macroporous ceramic materials with high electrical conductivity and mechanical strength are urgently needed for semiconductor and display manufacturing devices. In this work, we obtained electro-conducting macroporous aluminosilicate ceramics having surface resistivity of 108~1,010 ohm by dispersing electro-conducting carbon in ceramic matrix. By addition of 0.5~3.0 wt% frit glass, chemical bonding between grains was strengthened, and flexural strength was enhanced up to 160 MPa as a result. We evaluated the characteristics of present ceramics as vacuum chuck module for liquid crystal display display manufacturing devices.
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