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Al2O3 substrate
WHERE t1.sid in(parameter_dbtbl_keyword '%Al2O3 substrate%') and t1.xml_status <> 99
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Al2O3 substrate (1)
RF-magnetron reactive sputtering (1)
Ta electrode (1)
Ta2O5 (1)
tantalum pentoxide (1)
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2003 (1)
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Hyeon Ju Kim (1)
In Seong Kim (1)
Sang Su Kim (1)
Jae Seong Song (1)
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Al2O3 substrate (1)
RF-magnetron reactive sputtering (1)
Ta electrode (1)
Ta2O5 (1)
tantalum pentoxide (1)
Ti-O buffer layer (1)
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"Al2O3 substrate"
The Characteristics of Ti-O Buffer Layered Ta/Ta2O5/Ta Capacitors on the Al2O3 Substrate
Hyeon Ju Kim, Jae Seong Song, In Seong Kim, Sang Su Kim
J Electr Electron Mater
2003;16(9):807-811.
Published online September 1, 2003
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