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"Acid Vapor Texturing"

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"Acid Vapor Texturing"

Display and Optical Devices : Optimizing Surface Reflectance Properties of Low Cost Multicrystalline EFG Ribbon-silicon
Byeong Guk Kim, Yong Koo Lee, Hao Chu, Byoung Jin Oh, Jae Hwan Park, Jin Seok Lee, Bo Yun Jang, Young Soo An, Dong Gun Lim
J Electr Electron Mater 2011;24(2):121-125.   Published online February 1, 2011
Ribbon silicon solar cells have been investigated because they can be produced with a lower material cost. However, it is very difficult to get good texturing with a conventional acid solution. To achieve high efficiency should be minimized for the reflectance properties. In this paper, acid vapor texturing and anti-reflection coating of SiNx was applied for EFG Ribbon Si Wafer. P-type ribbon silicon wafer had a thickness of 200 um and a resistivity of 3 n-㎝. Ribbon silicon wafers were exposed in an acid vapor. Acid vapor texturing was made by reaction between the silicon and the mixed solution of HF: HNO3. After acid vapor texturing process, nanostructure of less than size of 1 um was formed and surface reflectance of 6.44% was achieved. Reflectance was decreased to 2.37% with anti-reflection coating of SiNx.
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