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Acid Colloidal Silica
WHERE t1.sid in(parameter_dbtbl_keyword '%Acid Colloidal Silica%') and t1.xml_status <> 99
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"Acid Colloidal Silica"
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Keywords
Acid Colloidal Silica (1)
Chemical Mechanical Planarization (1)
Copper (1)
Semi Abrasive Free Slurry (1)
Publication year
2004 (1)
Authors
Ui Gu Jang (1)
Nam Hun Kim (1)
Sang Yong Kim (1)
Tae Hyeong Kim (1)
Yong Jin Seo (1)
Keywords
Acid Colloidal Silica (1)
Chemical Mechanical Planarization (1)
Copper (1)
Semi Abrasive Free Slurry (1)
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authors
Ui Gu Jang (1)
Nam Hun Kim (1)
Sang Yong Kim (1)
Tae Hyeong Kim (1)
Yong Jin Seo (1)
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2004 (1)
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"Acid Colloidal Silica"
A Study on Semi Abrasive Free Slurry including Acid Colloidal Silica for Copper Chemical Mechanical Planarization
Nam Hun Kim, Sang Yong Kim, Yong Jin Seo, Tae Hyeong Kim, Ui Gu Jang
J Korean Inst Electr Electron Mater Eng
2004;17(3):272-277.
Published online March 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.3.272
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