Ceramic thin plates are widely utilized in various advanced technologies, such as fuel cells and heat dissipation substrates, due to their high mechanical strength and thermal conductivity. However, the trend of thinning ceramic plates increases warpage, which can critically affect product quality and reliability. Therefore, understanding and accurately measuring this warpage has become increasingly important. In this study, a non-contact measurement method, the light sectioning technique, was applied to measure the warpage of thin ceramic plates with a half-cell (anode/electrolyte) structure for solid oxide fuel cells (SOFC) by varying their area and thickness. The relationship between the physical properties of the thin plates and the warpage was analyzed. Additionally, a comparative analysis was conducted to evaluate warpage errors caused by compressive loads during the traditional contact measurement process. Finally, to verify the reliability of the non-contact measurement method, four types of non-contact measurement techniques - light sectioning technique, laser displacement measurement, optical confocal technique, and white-light interferometry technique - were used to compare warpage data by orientation. The results were also compared with those from contact measurement methods to analyze the average warpage values. Through this, the superiority and high reliability of the non-contact measurement method were demonstrated.